Design Of Host Computer Software For Lithography Dual Wafer Stage System

Ultra-precision components such as integrated circuits, semiconductorcomponents etc have been widely used in various industries, and lithographybecome particularly important as the main devices to product ultra-precisioncomponents. Dual-stage are the critical subsystems of lithography machine. Itscontrol system mainly consists of upper and lower machine parts. The lowermachine refers to IPC system which use VME bus systems, incluing multi-blockcontrol board and PowerPC processor that running VxWorks system, controls theoperation of the dual-stage. Host computer system is the application sofewaresystem developed on PC, which is responsible for management, monitoring,simulation dual-stage operation, data post-processing, and providing users with afriendly man-machine interface.The research and development works of the host computer system are describedin this paper. Firstly, the host computer system is overall planned and modulardesigned according to the overall design and workflow of dual-stage. Then,everymodule of the host computer system is specific developed and implemented usingthe C++programming language in C++Builder development environ ment. It mainlyincludes network communication module, database module, serial communicationmodule,simulation module and software encryption module.After the development works of all system modules are completed, system isoverall implemtented using the interfaces proveded by these modules. The overallimplementation of the host computer system means the realization of the function ofeach part. including the realization of login security function, parameters settingfunction, real-time monitoring funtion, data processing function and the simulationfunction.Testing for the development of software systems is essential. The hostcomputer system testing work includes the system’s internal testing and on-linetesting of two parts, the system’s internal test contains the test of system encryptionfunction and system login function, the on-line testing includes the relevant test ofnetwork communication, serial communication, three-dimensional simulation.Through repeated testing of the host computer system in order to verify the integrityand reliability of the system function.