The Design Of Dual Stage Software And Application On Wafer Transpoart System

Dual stage is the core part of the lithography motion control system. Dual stage is driven by multiple motors. As the dual stage is a platform for high-speed operation, which makes the dual stage motion control systems for demanding real-time. Wafer handling lifting mechanism responsible for the wafer transport in dual stage lithographic, its dynamic performance and steady-state error affect the yield of wafer lithography and quality of silicon. In this paper, the upper and lower sets of embedded machine for the dual stage are designed and wafer transfer elevator motion control system is designed..Firstly, the overall software architecture of heterogeneous platforms upper and lower machine system is determined based on the functional requirements of dual stage. Lower machine Vxworks embedded system structure is introduced in detail and a communication mechanism embedded host CPU board with multiple motion control card is designed. The next lower machine Vxworks embedded system mission is planned, including inter Vxworks embedded system task synchronization, communication task and scheduling task. Finally, lower machine embedded real-time multitasking system is accomplished.Secondly, the upper machine is designed based on the MFC,then the problem of data transmission between the upper and lower machine is solved by researching the size-ended mode for heterogeneous platform. Finally, the upper machine program is designed based on functional needs and the experiment verify the upper machine.Thirdly, wafer handling lifting mechanism is responsible for the wafer transport in dual stage lithographic, this paper designs total solution of wafer lifting mechanism and plans trajectory of wafer lifting mechanism.while taking full account of disturbance and mechanical resonance of wafer lifting mechanism.Finally, the wafer lift control system is experimented by the hardware and software platform, then the PID control algorithm based feedforward control is designed and the experiment verifies the correctness of the control system.