Host Computer System Development And Implementation Of Wafer Stage

Lithography as the most important equipment in the lithography process, theaccuracy of it directly impact on the integration of integrated circuits,waferstage as one of the most important parts of the lithography, the accuracy of itdirectly impact on the lithographyindicators.The host computer system of thewafer stage is mainly used for the wafer stage process control，real-timemonitoring and simulation debugging,so it is an integral part of wafer stage.The host computer system developed using the Broland C++Builder6.0development environment,the main task is to communicate with VxWorks bynetwork communication.The paper clears the task of wafer stage fristly and onthis basis planning the host computer system in accordance with themodularization,the system is divided into user management module,databasemodule,real-time montroring module,simulation debugging module,networkcommunications module and data file module and each module carried out adetailed introduction.Secondly,in accordance with the requirements of each module encapsulatesthe database class,network communication class, FDB file class and dynamiccurve drawing class,at the same time introduced the design method,function-ality of the class and the wrapper functions in detail.Finally, basis of the underlying class implements the user login,registrationand managemnet function,real-time monitoring function,simulation anddebugging function,prrameter configuration function and informating queryfunction of the host computer.At the same time design a friendly interface toachieve control of the lower machine.According to communicate with VxWorksand joint test with the simulation slave computer, testing whether the system isto achieve the desired objectives.