Design Of ECC EFuse1KB In65nm CMOS Technology

With the situation that the process of traditional fuse cannot be compatible with thenewly process of CMOS becoming one of the most critical issues for restricting the ICdevelopment, the latest booming eFuse(Electrically Programmable Fuse) technology,having compatibility with the CMOS process, implementing redundancy circuit andbeing available to be programmed after package becomes a research hotspot in the field.This paper describes the working principle of eFuse and analyzes the possible factorsthat may affect its performance and reliability; A eFuse circuit which has ECC functionand can replace the wrongly programmed fuse were designed; Based on this, the wholecircuit and its key parts were verified by software; Finally, we designed the layout ofthe eFuse circuit and taped it out for testing.After taping out, the eFuse circuit was tested in two aspects generally, including itsreliability and function. And the reliability testing contains three aspects: TC, HTS andHAST. The testing results show that, the function of this circuit has been satisfied withthe original expectation.