Studies On The Fast Discharge Circuit Of Excimer Laser

As a high-power UV light source, the excimer laser has become an important memberof lasers since it was born40years ago. At present, it has played an irreplaceable role inindustrial, medical, scientific research and other fields and is continuously opening up newapplication areas. The output characteristics of laser power supply have a great influence onthe performance of laser. Excimer lasers need the high-voltage power which can generate ananosecond rising edge. In this dissertation, with the combination of modern powerelectronics and pulsed power technology, a high voltage power with fast pulse rising edgewas studied.Firstly, the excimer laser and excimer laser power supply technology was introduced,and various types of power technical characteristics and application range was analysed andcompared. In order to obtain the high-voltage and nanosecond rising edge pulse, a schemeof using magnetic switches to constitute pulse compression system was determined.Secondly, the basic principle and design idea of the high-power supply was describedin detail. The excimer laser power supply was divided into three modules, namely, powersupply module, pulse forming modules and pulse compression module. Pulse formationprocess in the Pulse forming modules was calculated and analyzed, an IGBT was chosen asa control switch, and then the intelligent driving module CONCEPT1SD536F2wasselected for IGBT driver.Thirdly, combined of magnetic properties analysis, core material was selected andmagnetic pulse compression network parameters ware designed. Also the appropriate corematerial and size, winding mode were determined to assemble into pulse transformer.Finally, combined with laboratory existing conditions, circuit experiment testing wascarried out, the experimental results were analyzed. At last, optimization design solutions ofthe excimer laser power were discussed.