Magnetron Sputtering Technology Research Of Semi-Conductor Laser Cavity Face Film

Magnetron sputtering film coating technology is widely used in coating fields.Which could make the thin film have many advantages. Such as, high density, low substrate temperature and good repeatability and so on. It is extremely suitable to the cavity film of high power semi-conductor laser. Consequently, based on theory, this article is focus on the GaAs/AlGaAs semiconductor lasers of808nm, researching the relationship of slope efficiency, threshold current and gain threshold with resonant cavity surface reflection; With the purpose of raising slope efficiency, output power and appropriate threshold value current, the author designed and prepared the semi-conductor laser cavity surface film.This article according to calculating the relationship of cavity surface reflectivity with threshold electric current and Slope efficiency. Design the first cavity surface reflectivity for7.3%with single SiO2film as increase permeable film and the after99.2%of the cavity surface reflectivity G(Si/SiO2)3A as high reflectivity film, and design of15run ZnSe film as the passivation layer,which used in808nm semi-conductor lasers. The results show that, threshold current increased slightly within the acceptable limits, but the damage threshold of semi-conductor laser, slope efficiency and output power improved obviously.