Research On Preparation Of Metal/SiO₂ Optical Attenuation Slice By Green Coating Technology

Optical attenuator is vital passive device to control and balance luminous power which is replaced hardly in fiber-optical communication. Optical attenuation slice is core component of optical attenuator. We adopt vaccum evaporation coating method which is one of green coating technologies for preparing Metal/SiO₂ optical attenuation slice in this topic, this method is used widely, which is a kind of metal deposition with strongest and most extensive application of applicability, lowest cost in economy and green. Green coating is a new technology in field of surface engineering and solves the contradiction of sustainable development and environmental pollution, in addition, it has the dominant position with other kind of electrofacing and chemical plating in application. Preparing optical attenuation slice with green coating technology can achieve win-win effect in both economic returns and social effects.In this thesis, Al, Cu, Cr and Ni were spreaded separately on the surface of SiO₂ glass with DM-300B vacuum evaporation machine by keeping vaccum above 1.3×10^-2Pa, Different bombardment voltage, bake voltage and rotational voltage were chosen. Organization structure and property of optical attenuation slice were researched mainly by the influence of bombardment voltage, bake voltage and rotational voltage. The influence of technological parameter on film composition, film surface and profile structure were studied with EDS, SEM, AFM, different mental and technological parameter effecting on transmittance were tested by 721 spectrophotometer.The analysis showed that the structure of Metal/SiO₂ optical attenuation slice thin film was dense and continuous with thickness of micrometers. The grain size was distributed homogeneously at nanoscale. The cohesion of metal and glass was not through physical but chemical adsorption together with physical grafting, and the Metal/SiO₂ composite film was formed.Further research and analysis on structure and transmittance of the optical attenuation slice lead to the conclusion that Al and Cr were the best coating material, Cu film prepared with steaming plating was not transmitting for light which can be used for preparation adjustable optical attenuator with pure glass. Ni was not suitable as coating material based on present study. The results demonstrated that bombardment voltage and bake voltage with values of 175V and 160V for evaporating Al film, 200V and 100V for evaporating Cu film, 210V and 120V for evaporating Cr film, respectively, would result in the optimistic structure and property for optical attenuation slices.