Quasi-static Pull-in Analysis Of Parallel-phate Electrostatic Mems Actuators

Based on the MEMS(micro-electro-mechanical system) technology,the micro-sensor and themems actuators are growing rapidly.In its various drive manners, the electrostatic drive occupies animportant position.Pull - in phenomenon is an important feature in the micro actuators driven byelectrostatic,which has aroused wide attention and research. There are both advantages anddisadvantages in Pull - in phenomenon ,but people can control it just confirm the accurate pull - inposition. Therefore, whether in the theoretical research, or in practical applications, it is verynecessary to obtain precise datas related to pull - in position.This paper describes the development situation and development trend of themicro-electro-mechanical system, and introduces the manufacturing process of themicro-electro-mechanical system and situation of study about micro actuators ,both at home andabroad . And simply introduces the pull- in phenomenon of micro actuators and itsmechanism .Through analyses the pull- in phenomenon of parallel plate micro actuators under thesituation of ignore edge field effect, making a detailed analysis on the parallel plate micro actuatorsand gets the relevant datas.Besides,the paper also introduces the edge field effect of parallel platemicro actuators , and analyses the emergence mechanism about edge field effect. Throughtheoretical analysis ,the edge field effect of parallel plate capacitor is studied in detail.On the basis of the existing three theoretical model,this paper mainly studies on the static pull -in phenomenon of parallel plate micro actuators , under the situation of considering edge fieldeffec.Through theoretical model of parallel plate micro actuators, the related data is obtained relatedto pull - in phenomenon. Through the case analysis, the author examines the variation of parametersof the parallel plate micro actuators influence on pull - in voltage and pull - in position .Finally ,using finite element analysis software ANSYS modeling, through comparing the data , theauthor explains the accuracy of theory model and its applicability.