Design And Simulation Of Micro-electrostatic Imaging System

Electrostatic imaging is a detection method by sensing the space electrostatic fieldsurrounding charged target to obtain the target’s contour. Compared with other imagingmethods, electrostatic imaging has the advantages of good concealment, anti-interference,anti-stealth, and is valuable to research. In this paper, a directional electrostatic imagingsystem is designed based on MEMS technology in order to improve the resolution ofelectrostatic imaging. The system is able to image charged target within a certain distancesuccessfully.Firstly, charged characteristics of target and model of electrostatic distribution areanalyzed based on charged mechanism of target, and we propose a point chargereplacement model which provide a reference as quantitative evaluation for the imagingeffect in the paper. Then, an electrostatic imaging sensor is designed on the principle ofdirectional electrostatic induction and the theory of micro electrostatic field sensor. Itsdirection, design selection and sensitivity are analyzed by using MAXWELL. The resultsprove the rationality of electrostatic imaging MEMS sensor’s design. Then, a planarnetwork type of imaging array is laid by using the directional electrostatic imaging MEMSsensor as the basic unit in square adjacent. The simulation result shows that the imagingarray composed by the electrostatic imaging MEMS sensor can effectively fulfill thefunction of imaging the target. It is also proved that the design of electrostatic imagingsystem based on MEMS is feasible and can improve the imaging resolution effectivelycompared with the previous system. Finally, a image processing is designed by usingimage denoising and enhancement method. The simulation result visually proves thenecessity of image optimization.The paper is mainly studied in MEMS electrostatic imaging sensor, imaging array ofthe micro electrostatic imaging system, the static image optimization design. The feasibilityand rationality of the design are proved by the method of simulation. Result of this paperhas an important directive significance of developing micro electrostatic imaging system.