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Design And Simulation Analysis Of Electrostatic Comb-drive Actuators Based On Si-based GaN

Posted on:2016-03-12Degree:MasterType:Thesis
Country:ChinaCandidate:H Y ZhengFull Text:PDF
GTID:2308330473965287Subject:Optical Engineering
Abstract/Summary:PDF Full Text Request
As an important branch of micro electro mechanical systems, optical micro electro mechanical systems have been used in commom life and industry. With the development of the multi-function, miniaturization and integration of optoelectronic devices and optical communication technology in the future, optical micro electro mechanical systems will be further developed. At the same time, semiconductor light-emitting diode(LED) and laser diodes(LD) based on GaN-based semiconductor material has entered the market, with huge market prospects. Therefore, the nitride light-emitting device with continuous wavelength distribution is integrated into silicon optical micro electro mechanical systems, developing new optical micro-system or optoelectronic device fabrication, which has become a new research field with broad prospects. As a core component of optical micro electro mechanical systems, Micro actuators, with GaN-based materials, have great potential applications in optical micro electro mechanical systems, so the studying of GaN-based micro drive are necessary. Among them, the electrostatic actuators are used widely because of its simple structure, production process maturity and other characteristics in micro-electromechanical systems.This paper studies the electrostatic comb-drive actuators based on GaN. Firstly, an overview of the development status and characteristics of the micro-electromechanical systems is recommended, presenting the relevant background and significance of the issue. At the same time, electrostatic micro drive based on GaN development is introduced. The principle and challenge of electrostatic actuators is elaborated. Then, using the finite element software COMSOL Multiphysics, two-dimensional and three-dimensional structures of GaN micro electrostatic comb-drive actuators have been modeling and simulating respectively. The driven displacement of the two structure are 1.21μm and 0.34μm respectively under 20 V driving voltage. The effects of major structural parameters and the drive voltage for driving the micro-drive displacement are discussed. At the same time, using the finite element modal analysis method, GaN micro drive motion modal is researched, educing the natural frequencies and mode shapes of the first six-modal respectively. A detailed analysis of the various modes of movement direction and the tensional deformation is conducted, and the analytical results determine the natural frequency of micro drive working modes is 58.6KHz.Finally, the design of the adjustable micromirror gallium nitride based silicon micro electrostatic comb drives is projected, by changing the applied drive voltage, it is possible to realize the orthogonal adjustment of a micro-mirror in a horizontal plane and vertical direction,respectively is driven in both directions of displacement. The coupling displacement under orthogonal drive is studied theoretically and compared with non coupling displacement by simulation. The result shows that the two drive displacement are about the same under small voltage, however, with the increase of drive voltage, coupling displacement is bigger than non coupling displacement due to the enhancement of the edge electric field.
Keywords/Search Tags:micro electro mechanical systems, electrostatic actuators, GaN, modal analysis, micromirror
PDF Full Text Request
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