The Pull-in Analysis Of Torsional NEMS Acutators

Nano Electro Mechanical System (NEMS) is a kind of widely used technology in21st century.It has been used in military defense, aerospace engineering and biomedical engineering. Soprofessors from different countries consider its high value. Actuator is the core of NEMS and itcould not only provide power to the NEMS, but also be the operation unit. Electrostatic NEMSactuator is a common NEMS actuator. In the process of studying electrostatic nano-actuators, thereis a pull-in phenomenon. It is also known as pull-in instability phenomenon and is an importantfeature of the electrostatic nano-actuators.In this paper, we introduce the development and application of micro-nano-electromechanicalsystems at home and abroad. Based on lumped model of torsion actuators, it simply introduces thepull-in phenomenon of micro actuators and its mechanism. Then it analyses the pull-in parametersof the torsion NEMS electrostatic actuators without Casimir effect. We will study the pull-inphenomenon through the force method and energy method. Then on the basis of this study, itanalyses the pull-in phenomenon of torsion NEMS electrostatic actuators with Casimir effect. Thenwe get the pull-in instability related data. Finally, dynamic stability of torsion NEMS electrostaticactuators with Casimir effect is researched. It theoretically analyses the pull-in characteristic oftorsion actuators under the step-in voltage response and modulated voltage response. Then we usethe software of Matlab, it is the mathematic software to simulate the pull-in parameters and pull-inposition of torsion actuators under the step-in voltage response and modulated voltage response.Afterwards, we compare the simulation results with the theoretical analysis and make theconclusion.