Research On The Modeling And The Implement Technology Of Micro Dielectric Droplet Impingement Cooling System Based On MEMS

With the increasing integration of electronic opponents, heat-control of micro-electronics systems is becoming more and more serious .It is necessary to urgent solution. On the basis of analyzing traditional chip cooling methods, a new cooling approach—the micro dielectric droplet impingement cooling system based on MEMS (Micro Electro Mechanical Systems) -is presented in this thesis. Model building and related techniques are also studied.The main research contents are as following:1. Cooling system: A micro-droplets generator is presented to analyze the emergence of micro-droplets, the collision module of micro-droplets on solid face and heat transfer between them, vesicular boiling heat transfer of the collision droplets and their influencing factors as well as the choice of coolant.2. Modeling basis of MEMS components: The ranks of MEMS modeling are introduced, methods of lumped parameter modeling, node analysis, language of behavioral modeling VHDL-AMS are lodged, multi-physical couple field of MEMS is discussed.3. Dynamical system: The design program of a micro valveless pump with electrostatic actuation and establishes a finite element model of micro pump membrane is presented in the paper. Direct-coupling is adopted to simulate the shape change of membrane caused by electrostatic actuation and related cavity volume change of micro pump. Meanwhile, the impact of corresponding opponent parameter on cavity volume change is also shown, like thickness and radius of membrane, electrode gap and slaving voltage. The dynamic characteristics of membrane is tightly related to the operating efficiency of micro-pump, and relationship between free frequency of membrane and its thickness is discussed with methods of modal analysis, harmonic response analysis and transient dynamics analysis too. As an important working parameter, time history plot of flow is imitated.4. Design of experiment structure on micro-droplets collision cooling system: According to measured data and observed phenomena, auxiliary equipment and control system of the experimental platform is designed. The experimental project is presented, including one-way heat transfer of open system and reversible heat transfer of closed system.