Simulation And Analysis On Mechanical Characteristic Of The Micro Comb-drive Resonator

Microelectromechanical system (MEMS) has come to a step of practicality from fundamental research. The study of reliability and application is complicated for MEMS techniques. In the working environment, the micro devices will be affected by the multiple fields jointly, for instance, electrostatic domain, fluidics, thermal domain and so on. The complicated characteristic of multi-coupling in the motive behavior of MEMS makes it inevitably to analyze the coupling process. In other respect, the motion of the devices is greatly influenced by machining error, variety of parameters, and deformation as well, especially the fault of structure, which make the approach of kinematic accuracy becoming critical. Simulations and experiments of the movement for micro devices with defects are necessary. The quality and reliability of MEMS products can be improved, using the stable model of fault and testing method to detect the fault.The feasibility of comb driving has been proved years age, as well as application. As sensitive component for micro resonator, many aspects of comb structure have been investigated. So far, the character of accuracy control for the structure cannot satisfy the demand, therefore the simulating of the driving has been taken more attention.The static and dynamic drive performances of typical micro comb resonator are analyzed in the paper, and primary dynamical tests is established. Model of micro comb structure is simulated in areas of statics, electricity, dynamics, based on the FEM software ANSYS. In the aspect of static driving, with complex mechanical factors contributing to the drive characteristics, the driving force and displacement affected within the variety of parameters for structure are discussed,considering the electrostatic-structure coupling, as well as the comb beam sloping and side offset caused in fabricating. Dynamic parameters are the working index of resonator. On the section of dynamical simulation, 3D dynamic model of micro comb structure is built to research the motion of micro comb resonator with faults, in which both Couette flow model and Stokes flow model are contributed to the damping. Structures with point stiction or crack or broken beam are analyzed for the dynamic performances. The results show that faults make the vibration performances of the resonator changed in different lever, with which we can tentative diagnose these common faults. As the basic technique, Testing places an important role in the development of MEMS. In the paper, a dynamical testing system founded on laser Doppler vibration meter is primarily established, and initial data is obtained.