In The Chip Manufacturing Process, Electrostatic Discharge (esd) And Its Control Countermeasures

With the high development of electric industry, the harm caused by the static becomes more and more serious in the processes of producing and using electric products, and it brings inestimable economic loss. In America for example, the loss caused by static reaches 10 billion dollars every year in electric industry. It is just the electrostatic discharge (ESD) result in the harm. ESD can make the electronic units incapable or lead to hidden trouble, and even damage electronic products completely.Starting from the principle of ESD, this paper discusses how the ESD comes into being and its harm to electronic products in the process of chip producing, and especially discusses the theory and practice of electrostatic test in the chips manufacturing workshop. Based on this, the author did some test-work in Shanghai Belling Co. Ltd., mainly about every type of equipments in the electrostatic discharge protected area in some workshops (including artificial aging workshop, testing workshop, semi-finished articles storage workshop and finished articles storage workshop, etc). This paper estimates all the test data and puts forward some technical advices.This paper also introduces three kinds of ESD model in the electric industry: human body model (HBM), machine model (MM) and charged device model (CDM) and classification standard of ESD sensitive device. It also puts forward the idea of designing the ESD protecting area and the developing tread of ionizer. So we could settle the technical base for the synthetically ESD countermeasure of IC manufacturing in more searching and consummating steps.Zhao Junping (Power electronics and electrical drive)Directed by Sun Keping...