Realization Of Interface A Standard For Semiconductor Equipment Based On Web Service

As the largest market of electronic products and future important IC production base, Chinese Semiconductor Manufacturing is playing a decisive role in global Semiconductor Industry. As a high value-added industry, it is not enough to only have massive production capability, R&D and Application of Advanced technology is the core competitiveness.First, this thesis expounded this CIM application and CIM components in Semiconductor Industry started from its important role is this domain. The introduced the concept of Factory Automation. It also introduced the reason why Factory Automation had been worked out as an important solution and it great practical value to this industry through review the growth history of Factory Automation. It also presented the various applications in of SEMI Standards in current Semiconductor Manufacturing Environment. Due to the development direction and stress for whole Semiconductor Industry, present why Interface A is detruded andThis thesis demonstrated the research and development for Interface A project based on an Etch Process Equipment produced by a domestic company, beside the basic300mm SEMI Standards implementation as most300mm IC Fabrications required. The implementation of Interface A includes XML data transfer via Web Service, the Client authentication and authorization, and the DCP (Data Collection Plan) management. Now the300mm Factory Automation Module has been qualified by several IC Fabrications for mass production. The Interface A module is under integration test. It will be published as an Advanced Equipment Data Acquisition Solution in Factory Automation.