Design And Implementation Of Rcc In Factory Automation System

Based on the analysis of three primary Equipment Integration model in the Factory Automation System of Semiconductor, It's analyzed the function of the Equipment named Robot Cell Controller, studied and realized the method for Robot Cell Controller using the Advanced Process Control mode in the thin film solar factory.Firstly, this paper introduces the basic function of the Factory Automation System, Manufacturing Execution System and Equipment Automation Platform, analyzes and compares three equipment integration models currently using for semiconductor factory:Cell Controller mode, Component Control mode and Advanced Process Control mode. Then, this paper analyzes the function of the Robot Cell Controller in the thin film solar factory, realized the RCC simulator for software developing and testing and the integration in the Factory Automation System. The main work is to realize the Equipment Adapter for RCC, realize the RCC process control in the Equipment Automation Control Platform and the logic control in Manufacturing Execution System.