Support The Mems System-level Design Of The Emulator

MEMS is defined as an integration of sensors, a signal processing part and actuators in a single chip for improved accuracy, reliability and functionality.At present, the high cost and long design cycle of MEMS products restrict the growing due to the comparatively low design level. Thus, the design of methodology MEMS and CAD tools have been great significances in international MEMS researches with important theoretical and applied value. System-level modeling and simulations are the key issues to realize computer-aid virtual design of MEMS, Meanwhile, the simulator for system-level simulation become a astriction of system-level design.This thesis chooses the international standard hardware description language------VHDL-AMS, to implement MEMS system-level modeling. The analog andmix-signal extension syntaxes of VHDL-AMS are researched, and are used to implement several modeling method for MEMS system-level. Then, an example of MEMS beam is presented to exhibit the flow of MEMS system-level modeling based on VHDL-AMS. The mechanism of mix-signal simulator is researched, it includes the eliciting of mathematical model based on VHDL-AMS, the solving flow and algorithms of analog solver, containing trapezoid method, the Resistance Newton-Laphson method and the strategy that combines complete LU factorization and iterative method which is used in ZeniVDE simulator. At last, the feasibility and validity of the modeling method based on VHDL-AMS and algorithms of mix-signal simulator are validated, through the modeling and simulation of comb resonator and micro-accelerometer.The application of VHDL-AMS for MEMS system-level modeling can enhance the model in currency and extension, meanwhile, the strong ability of VHDL-AMS also provides convenience for modeling. At the same time, the design and software implementation of mix-signal simulator with the whole intellectual property are significative for the design of methodology MEMS and CAD tools development interiorly.