Mems Integrated Design Platform Modeling And System-level Design Technology,

With the development of MEMS towards industrialization, it is an effective means to established the integrated design platform in order to design MEMS systematically, scientifically and standardizedly, which is important to reduce the iteration and waste in the manufacturing of MEMS, shorten development cycle of products and improve the design and manufacturing quality of MEMS. The modeling of the design platform and the system-level design of MEMS are important parts of the MEMS integrated design platform and the highlight in front edge of the international MEMS research, with important theoretical significance and applied value.At first of this thesis, the MEMS integrated design platform based on a top-down design and bottom-up verification approach was modeled by UML in the object-oriented method. The architecture of the platform was established based on the Distributed Object Computing with CORBA specifications. The Initial Graphics Exchange Specification (IGES) was introduced to interchange the information between different CAD tools. The persistent objects were saved in relational database by mapping persistent objects to relational tables.Secondly, a network based on multi-terminal components modeling methodology was applied to model MEMS at system-level by the analogy and mixed-signal modeling tool of VHDL-AMS, for the system-level model of MEMS is a mixed signal model, which has attributes of multi-energy domains coupling, multi-signals mixed and interacting between discrete-event subsystems and continuous-time subsystems. With this method, the whole system can be divided into some subsystems defined as multi-terminal components; the behavior of the subsystems depends only on their terminal signals; the information exchange between subsystems was done by the signals at their terminals. The continuous-time systems or discrete-event systems can be modeled and simulated with this method, which satisfied the requirements of nonlinear systems and large signals analysis.In order to simulating rapidly and analyzing the dynamic behavior of the whole MEMS but not reducing accuracy significantly, the terminal behavior of multi-terminal components was modeled as reduced-order model (or called macromodel). Upon the finite element model theory micro-mechanical devices or components were modeled in the spatial, which afforded theoretic foundation and technicalsupport to MEMS system-level design.In addition, the theory and methodology of automatically generating analytical macromodels of microstructures from 3D solids was researched, which can be used to design MEMS in a bottom-up verification path at system-level.With those understandings, a vibratory-rate micro-gyroscope was modeled and simulated at system-level with the macromodeling approach, which offered the references to the MEMS device-level design.