Platform-Spanning Modeling Technology Of MEMS At System Level

Reusable Intellectual Property (IP) based method is promising to be the main trend for microelectromechanical systems (MEMS) modeling and simulation at system level. With this method, MEMS are decomposed into several functional components such as beams, plate masses and alterable capacitors. All the components are modeled as parameterized elements and connected to represent the whole MEMS. At present, parameterized elements based on IP method are limited to certain simulator, and can't be implemented in other simulators.This thesis presents platform-spanning modeling technology at MEMS system level. The international standard hardware description language - VHDL-AMS, is implemented to establish a set of modeling criterion for MEMS design. The common form of ports, behavior models, parameters and schematics are defined, rules of ports connection is also presented. A set of parameterized MEMS elements is then established based on the behavior models of functional parts and network models of devices. Owing to the above work, the codes can be applied on different simulator, which improves the opening, platform spanning and expansibility of parameterized elements.The parameterized elements are validated using finite element analysis (FEA), and the result shows the behavior models are accurate enough. Finally, the microaccelerometer is modeled and simulated using this set of elements.