Measurement System Fluctuations In Source Separation And Monitoring Technology Research And Application

The measurement is a foundation of every quality management activities, it plays a very important role in the quality management. All the activities which include inspection, statistical process control and process improvement rely on the measurement. So the capability of measurement system decides the quality level of process and product.This thesis is organized as follows: Separating the variation cause of measurement system, then discussing the acceptance standard of measurement system, at last providing a new control chart of measurement system itself.In Section 1, we firstly introduce the variation theory in the production management, Immediately, we discuss the research areas of measurement system, which include the theory of measurement system analysis-MSA and measurement quality engineer.In Section 2, The theory of MSA is studied, we study this approach in the following aspects: the classification and estimation of measurement variation, the acceptance standard of measurement system.Then, we discuss the theory of statistical process control and the need to control measurement system itself. After analyzing the literature on controlling measurement system itself, we provide a new control chart: variance component control chart.Section 4 gives a research on measurement quality engineer, and compares this theory with MSA. Through this way, we form a conclusion that the measurement activities must be integrated in the manufacture process. In the last part, we also provide a tactic of measurement system design and implementation.Finally, we apply the tactic of measurement system analysis & control to the manufacture process, and give an implement guide. We also apply it to the process of wafer fabrication to validate this approach.