Research On The Technology Of The Silicon-Based SiO₂ Waveguide Passive Ring Resonator

First of all the resonant characteristic of ring resonator has been researched in this paper.The influence of the main parameters of resonator on the resonant characteristic and finesse has been illustrated supposing the ideal laser source.Then based on theoretical study,an optimized resonator was proposed which can be applied to the IOG (Integrated-Optical Gyroscope).The resonator loss was less than 0.5dB by using the SiO₂ on Silicon substrate whose transmission loss is 0.01 dB/cm.The finesse of the resonator was ensured.The structure of quasi-single mode waveguide can transmit fundamental mode and first-order mode.Curve waveguide filtered first-order mode so that only the fundamental mode transmitted in the resonator.The simulation and design of single mode waveguide,curve waveguide,directional coupler and monobloc construction of passive ring resonator have been accomplished by using BPM software.Finally,this method was validated effectively and practically by experimentation on this passive ring resonator (PRR).