Study On Silicon Photonic Integrated Devices Based On Microring Resonator

With the development of information technology, great changes have taken place in human life. Information data has mass increased which put higher requirements to information capacity, speed and cost. Silicon-based optoelectronic integration has attracted extensive interest due to its advantages of low cost, large bandwidth, low loss and strong resistance of interference, as well as the CMOS (Complementary-Metal-Oxide-Semiconductor) compatibility. Considering the development and the major application background of silicon-based optoelectronic integration, it has very important significance to carry out the high-performance light sources and integrated devices which are used for on-chip optical interconnection by integrating the silicon photonic devices and luminescent material together.In this thesis, we have designed and fabricated several tunable silicon ring reflectors, set up a system of hybrid silicon external cavity laser, made the theoretical analysis and experimental demonstration of a bandwidth tunable filter based on the ring resonator and MZI with Fano resonance. The main works are listed as follows:1. Optical source used in on-chip optical interconnect need monochrome, wavelength tunable cavity mirrors. To satisfy this demand, in this thesis, in this thesis, we proposed and experimental fabricated five reflectors based on the single MRR and three reflectors based on the double MRRs. The experimental results show that the highest reflectivity is 95% and the lowest reflectivity is 80%, which indicate that all the reflectors can be used in the hybrid silicon external cavity lasers. In addition, we discuss the factors which affect the reflectivities of the reflectors.2. Combining the RSOA and the fabricated reflectors together, we set up a system of hybrid silicon external cavity lasers and tunable lasers. The output of the lasers can up to be mW magnitude. All the side mode suppression ratios can be higher than 30dB. The wavelength of the lasers can be shifted one FSR by applying the electronic power on the heaters of the reflectors. The tuning efficiency of the central wavelength is 6.4 mW/nm.3. We proposed a bandwidth tunable filter based on the MRR and MZI with Fano resonance. The theoretical basis that the bandwidth of the filter can be tuned is the coupled-mode theory, the tunable characteristic and the coherent superposition of the MRR. It is analyzed in detail and experimental demonstrated. The device size is 1.25mm × 0.8mm. The tunable range of the bandwidth is 0.46nm-3.09nm (57.5GHz-386.25GHz).