Study Of On-Chip Integrated Gyroscope And Filter Based On Micro Ring Resonator

With the rapid development of micro-nano photonic technology in recent decades,the passive silicon waveguide structure have shown unprecedented development potential in many fields,especially in the case of high precision on-chip integration detector.Due to the structure of silicon on insulator(SOI)have a high refractive index difference,the size of integration device can reduce to the micron level.As a typically passive silicon waveguide structure,micro ring resonator has unique characteristics of wavelength selection,thus it becomes the core component of high precision detector devices like integrated on-chip gyroscopes and integrated on-chip filters.Moreover,when we combined the micro ring resonator with graphene,the disadvantages of traditional thermal modulation method which based on micro ring resonator can be effectively overcame,so,we can implement high-efficiency on-chip tunable filtering.This paper is concentrated on silicon micro ring resonator,we studied the characteristics of coupled resonator optical waveguide gyroscope and graphene based tunable filters,respectively.The main research contents of this paper lies in:(1)Systematically research on the basic theory of micro ring resonator,modeling on the filtering characteristics of resonator,analyzing the influence of various parameters on the filtering characteristics,using the three-dimensional finite difference time domain method to calculate the optical field distribution in the micro ring resonator.(2)Research on the basic theory and application of graphene,analyzing its optical properties in near-infrared band and short mid-infrared band,using light field pattern analysis method and three-dimensional finite difference time domain method to analysis the influence of graphene layers which are embedded in waveguide on the various parameters of waveguide structure.(3)Based on periodically modulated coupling coefficients and circumferences of resonator array,we developed a new structure for coupled resonator optical waveguide gyroscopes.With our new structure,which overcomes the individual limitations of the previous schemes,we can stably and effectively detect the rotating angular velocity and the resolution of our gyroscope can reach0.0001~?h.(4)An integrated,tunable spectrometer based on a silicon-on-sapphire platform is designed at wavelengths of 2.29–2.35?m.By controlling the applied voltage on graphene monolayer which is embedded in waveguide,we can realize controllable filtering in the range of 45 nm with the resolution of about 1.5 nm.(5)A multilayer graphene based tunable bandpass filter is proposed by using cascaded silicon microring resonators.We solved the problem of coupling-induced resonance frequency shifts through structure optimization.By tuning the Fermi level of the graphene layers,the position of the pass band can be dynamically modulated in the whole communication C-band.The out-of-band extinction ratio of drop port can be larger than 40 dB,the 3dB bandwidths of pass bands are over 2.8 nm,and the insertion loss is less than 1.5 dB.