Theoretical And Experimental Research On Silicon-Based Waveguide Resonator

Resonator Integrated Optic Gyro(R-IOG) is a novel optical sensor based on Sagnac effect.The Integrated Optic Ring Resonator(IORR) is the core sensing element of the R-IOG,it is the key to design and manufacture this kind of gyro.First of all,the theory of the ring resonator has been researched in this paper.The influence of the base structure parameters of resonator and the laser dimension on the resonant characteristic has been illustrated.Then using Jones Matrix,presents the polarization fluctuation in the resonator.After above analysis,an optimized resonator was proposed which can be applied to the R-IOG.Then fabricated SiO₂ optical waveguide ring resonator in Plasma Enhanced Chemical Vapor Deposition(PECVD) method and reactive ion etching.The loss of the ring resonator is 0.02dB/cm.By testing the resonant characteristic of this SiO₂ optical waveguide ring resonator,the resonance curve is measured,the finesse of the resonator is 16.7,which can offer academic reference for the deeply study of Resonator Integrated Optic Gyro.