Clean Room's Design, Monitor And Operation Cases Analyze Of Semiconductor Foundry

Clean room system provide clean environment to wafer process flow line of Semiconductor foundry. It is the basement of wafer production. Clean room means a special space area can control the temperature, humidity, cleanness, over pressure, air flow, air speed, noise, light and ESD and so on through remove particle, baleful air and bacteria etc. So clean room's running status is the most important factor for wafer quality and yield. Writer analyzed typical cases about clean room engineering design, management and operation, and brought some effective ideas through his experiences and other foundry's information. The paper introduce clean room system's compose, classes and work principle. According to different cleanness, temperature and humidity demands, writer makes the different proposal. The paper focused on Airborne Molecular Contamination (AMC) and temperature and humidity abnormal hunting problems. Writer gives system thinking style and effective methods after study deeply. The key points of study result as below. At first,it is essential and important for semi-conductor manufacture that design and plan of how to achieve high quality in low cost . The second, wafer process environment need enhance to high air quality for more sensitivity productions. So AMC control specification will more stringent than ever. Writer has done more research works all-around and deeply special for AMC control. First step is try to find out the source through monitor and test the environment. Then we can remove or control air contamination status through adjust the process or material at FAB. At the same time we can select special chemical filter for make-up air, recycle air and process tools. The third, face to temperature and humidity abnormal hunting of one special area, writer give a method to find out the root cause through the online monitor. If we find out the root cause we can think out the effective methods to avoid happen again. Finally, summary and compare the present conditions and new technology of Semiconductor Foundry's clean room. And forecast the trend of new design model and new tools of this industry.