Study On Intelligent Control System In Clean Room Air Conditioning System

Together with fast development of semi conductive industrial, many world-famous company have set up their plant in China, also many local investment joined in this field. Now more and more high class clean room were build in China. Therefore big difference between clean room and common plant, first structure and material are different; HVAC system is another different. HVAC system is designed base on different semi-conductive product. It require high standard of temperature and humidity. So the air conditioning system shall be controlled to match semiconductive requirement.Now a normal production process include incision, mold, curve, testing. In the environment, if the clean class is not enough high, like particle too much, air conductivity will be very high to damage the clip. Also if temperature or humidity is not stable, still will damage the clip. So the environment should be reliable, accurate, and adaptable. When outside factor impact this system, it should be under the control. It's necessary that we research the air conditioning control system.Clean room air conditioning is made of fresh air unit and recirculation unit. Normally there are 3 units for fresh air unit, two on duty one as standby. Entire system is used for removing the particles and heat from process.On control side, the PID control is popular method, it has good performance on common AC, but control speed and accuracy can't match this requirement of semiconductive production. We input the fuzzy PID and PLC to apply on this AC control system to ensure it more reliable and adaptable.This paper will make a deep research on these two methods, and use MATLAB to simulate and test these two methods to make a comparison.