Microcontoller-based Monitoring System For Clean Room Desing

Environmental indicators within the clean room of their own working conditions have a great impact, so accurate and complete clean room monitoring techniques is a key part of the clean room applications to ensure that work, about 50%.Based on to conduct research and analysis of the clean room environment in the semiconductor manufacturing industry, with the help of embedded technology to achieve the relevant environmental parameters monitoring, the monitoring data using a PC for processing. The environmental monitoring systems to meet future demand in the major diversification towards a controlled environment, a wide range of applications, monitoring of indicators such as diversity and precision of the direction of the trend.To design a perfect environment monitoring system comprehensively, and parts of choice is quite critical work. The monitoring system and the monitoring indicators are four:temperature, moisture, dust particle concentration and noise intensity. By the temperature and humidity sensor, respectively dust particle counter and noise sensor as a major acquisition module real-time acquisition corresponding environment monitoring index. According to the demand of cleanroom environment monitoring analysis of environmental monitoring system, choose core controller for single-chip microcomputer C8051F410, this single chip has tons of analog and digital resources, and adopts some in the SCM in a technology, and to make some prior to the CPU core internal and external a few key performance improvement, improving overall performance, the more easily in system design in use. Its general and special pins to connect multiple peripheral circuit modules, respectively, for the storage module, clock module, keyboard module, temperature and humidity monitoring module, monitoring module dust particles, noise monitoring module, LCD display module, serial module, communication module and power supply module. The single-chip microcomputer control part written in assembly language programming, each monitoring module timing acquisition environment parameters, real-time in local LCD display interface and sent to the remote monitoring of the upper, and the system of the upper keyboard and support of history data query. The user with real-time environment parameters and history environment parameters, monitoring and analysis for a period of time the change trend of the environment, so as to achieve the monitoring environment condition, ensure the quality of products of purpose.The system is based on C language software realize the system control procedures, including master control program, keyboard scan process, LCD driver, temperature and humidity collection procedures, noise and dust particles collection procedures, real time clock collection procedures, drivers, serial driver, etc. Master control program is the core of the system scheduler, system is running master control program according to the process of complete set data acquisition, display, storage and upload. In addition, the master control program of the real-time response keyboard command, complete history data of inquires and back.Because of the single chip calculation ability is limited, difficult to carry out complex data processing. So in this monitoring system, usually in the PC for PC, microcontroller is a machine under. The single-chip computer complete data acquisition and in each module is controlled by PC finish to all sorts of complex data processing and the SCM control. The system, PC role there are three major display monitoring data, and not normal to the parameters of the prompt and alarm; According to the time sequence data storage, the convenient user inquires history; Create a special used to store history of monitoring values database. Overall performance in terms of the monitoring system collection terminal with advanced technology, systems to achieve a new breakthrough in the way, the host computer for data processing and storage also reflects the real-time, targeted and integrity, in the dust room environment monitoring can play a good performance.