Research On High Resolutionlaser Laser Parallel Direct Writing System And Its Applications

Nowadays, with the development of opto-electronic devices, flat-plate display(FPD) and digital holographic industries, new and high requirements for laser direct writing (LDW) system appears increasingly. The recent studies on laser direct writing system are described on the following. The studies abroad focus on high speed precise laser lithography using single laser beam, which is widely used in IC manufacture, micro-optics components micromachining,laser wiring,MEMS,MOEMS and optical detecting etc. In our country, many research institutes also paid attention to LDW system, and applied this technology to fabricate binary optical components and various mask plates.In the dissertation, laser parallel direct writing(LPDW) system by using digital micro-mirror device (DMD) as input device is introduced. LPDW is applied to fabrication of interference lithography with the high resolutuion patterns. Through identifying the profile (contour) of patterns intelligently, the fabricationof high resolution optical variable device (OVD) is accomplished with higher efficient. Additionally, according to the method of array by array DMD input, the system operational efficiency is greatly improved. The confliction of high resolution and low efficiency for traditional LDW and e-beam exposure is overcome. Meanwhile, the high resolution 2D/3D, kinetic 3D, micro-texts, binary optical devices and light guide plate can be fabricated with the mentioned system by controlling the structure of input pattern, the exposure and the direction of interferential fringes.OVD processing and controlling software are also based on the LDW system, by which one high definition OVD processing and inputting method is presented, correspondingly it will not only make the step of fabricating high resolution phase image easier, the system function efficiency higher but also support the processing and inputting of 2D/3D, 3D images with complex structure, various tiny figures and letters etc, moreover employ different explosion mode to match it.With the research on hardware, software of the system and related technologies, we get the processing procedures and experimental parameters to fabricate different elements, which makes an excellent parallel direct writing system with higher performance and lower cost. The research results demonstrate that the parallel direct writing system has excellent performance. Especially, some elements (take the new generation of driving licence for instance) fabricated by the direct writing system have been commercialized.