High Precision Laser Direct Writing System For Micro-optical Device

In recent years, micro electro-mechanical system (MEMS) and micro-optical-electro-mechanical system (MOEMS) technology that incorporates lots of micro-optical, micro-electronic and micro-mechanical devices on a single chip have been developing rapidly, which brought forward continuous improvements to the related fabricating techniques. Among them the laser direct writing technique, which eliminates the need for any mask, has drawn more and more attention because of its flexibility, short fabricating term and high precision.The thesis developed a high precision laser direct writing system, which employed MINAS A serials alternating current servo motors with 17 bit opto-coders from corporation, a X-Y movement platform with high precision ball thread and linear slid guiders to ensure a movement precision near 30nm. The thesis then designed a three-dimensional movement control board for the system based on ISA bus, which used 8253 contours for the control of the speed and length of the motor and a 8255 interface chip for the control of the direction and limit position protection of the motors. Next with the aid of a PCI9052 chip the three-dimensional movement control board was adapted from ISA bus to PCI bus.For software design the control menu was developed using Visual C++ language, which could drive the X-Y platform to perform straight line and curve movements. In addition device driver was developed using WinDriver and related application programs were also composed.The lithography experiments on color films and SU-8 indicated that the laser direct writing system meet well the precision requirement for lithography. At the same time the system possesses many merits such as easy of operation, quick in respond, stable in performance and so on. Therefore it could be used widely for the fabrication of different kinds of MOEMS chips.