The Development Of Multifunction Digital Holographic Laser Interference Direct Writing System

Micro-optics is a new branch of optics discipline, the discipline includes advanced technology and cutting-edge knowledge intensive, micro-optics plays an irreplaceable role in many fields. However, the production of micro-optical elements has been unable to achieve by conventional machining processes, can only be realized by micro fabrication techniques. Direct write laser interferometer is a new micro-fabrication technology, combined with light diffraction and interference principle, changing the way the beam interference by a spatial light modulator, we can produce the required lithography optical recording material surface structure. The technology has a high resolution, high efficiency, relatively low cost and equipment cost, and therefore research laser interference lithography technique has important significance. This paper presents a novel method developed direct-write laser interferometer system, the system structure is simple, stable operation, the actual resolution of micrometer lithography, lithography experiment has been achieved in the production of diffractive optical elements and micro-optical structures processing, and to obtain good results.Chapter 1 from the background and significance of the subject of view, the method of micro-optics manufacturing technology and reviewed progress at home and abroad, a brief introduction and CGH holography, and introduces the main study of this subject. Chapter 2 introduces the theory of laser interference lithography, grating diffraction theory and the theory of holographic optical laser interferometer used in the direct writing. The third, fourth and fifth chapters are the main thesis-the completion of work, including direct-write laser interferometer system design and hardware selection, digital image processing algorithms and software development, test and evaluate system performance lithography experiments.Chapter 3 is the overall system design and hardware selection, first established direct-write laser interferometer system is designed according to the needs of optical micro and nano structures etched determine subsystem design structure of the system according to the design goal to complete the overall design of the system and the working principle of the system are introduced. Related key devices for selection according to the system design ensure that the device performance parameters can be selected to meet the design requirements.Chapter 4 describes the image processing algorithm and system control software, digital image processing algorithms introduces the diffractive optical element, optically variable images, achromatic optical variable image and calculate the hologram production, algorithmic program implemented by MATLAB software programming. System control software first functional analysis, specific functional modules, workflow design software, and finally writing software based on functional modules and workflow, written using C# language, based on the VS2008 development environment, to achieve a system of production control software.Chapter 5 describes the realization of direct write laser interference lithography experiments with the system, the system is first set up according to the system design, combined with the system control software written to test the system, to get the system-related performance indicators to meet ordinary lithography needs. After commissioning the system, for the relevant lithography experiments, including Fresnel zone lenses, optical variable image, achromatic optical variable image, CGH, have been expected.Chapter 6 is the research work carried out in this paper an objective conclusion and further research work indicates the direction.