The evaluation of beam quality is paid more and more attention,as the laser is used widely in many fields.Compared with other parameters,the M2 factor has many advantages. Although the M~2 factor can characterize the laser beam quality logically,the conventional measurement has many constraints.Crossed phase defocus gratings,which let us to get the beam spots at 9 various positions of the same beam to be measured simultaneously,are designed and a new technique for real-time measurement of beam quality factor M~2 is achieved in this paper.We first introduce the methods of measuring M~2 and the principle of defocus gratings, and then describe in detail the design of the gratings,the designed parameters of which is validated by using Zemax.A He-Ne laser beam is measured by using the gratings designed and a M~2 value is achieved.Compared with a conventional measurement based on a scanning sensor,the difference is between 3%and 18%.It is validated that the measurement based on defocus gratings is in effect.At last,the origin of the errors is analyzed.The results of this dissertation lay a foundation to form an applied system for real-time measurement of the M~2 factor and will be useful for the applications in future. |