MOCVD Long Range Monitor And Control System Design

MOCVD is an abbreviation form for Metal Organic Chemical Vapor Deposition, which is a method used to grow material crystal on substrate via MOCVD device. The crystal growing out with this method can be used for fabrication of various kinds of chips. This is one of the important methods for developing new type of photoelectric materials nowadays.At Present, operation of the whole equipment is performed by manual method for most of the MOCVD device in our country, which not only influences operating efficiency, but also brings about many errors and unstable factors for the whole processing procedure so as to directly cause low percent of pass of the grown components and reduced quality. Secondly, the site where MOCVD device is operated has loud noise, the operation environment is bad, and MOCVD response cycle is long, all these conditions are not good for manual operation. Therefore, in order to improve the operation accuracy of the whole equipment and improve operating environment, it's necessary to use automatic control equipment to perform real-time monitoring and management for the operating procedure of MOCVD device. However, circuits which are similar to MOCVD automatic control are all introduced from abroad with high cost. The writer designs a set of embedded monitor and control system with FPGA as its core to fulfill monitoring for MOCVD processing according to characteristics of MOCVD processing procedure.The system is fulfilled with three parts, first part is data collection and compression part, which collects data such as image, temperature, humidity and intensity of pressure and conducts compression processing; the second part is data transmission part, which transmits data to intranet via Ethernet interface; last part is computer management part, which displays operation image via computer, analyzes data such as temperature, humidity, intensity of pressure and sends control and management instruction.The detailed design is introduced in this paper and evaluated in system. An improvement of this design is brought forward.