The Development Of Parameter Design About Dry Screw Vacuum Pump

Recently, in the semiconductor manufacture process, it has high demand of vacuum environment cleanliness. The conventional oil vacuum pump can't meet the condition. Therefore, with wide bound pumping speed, simple structure, friction-free rotor, long life, low energy consumption and oil-free, the dry screw vacuum pump is recognized by more and more companies, it has a important station in the field of oil-free vacuum pump. In many developed countries, such as America, Japan, conventional oil vacuum pump has been replaced by dry screw vacuum pump in more and more fields. But because the machining of dry screw vacuum pump is quite hard, in our country, the dry screw dry pump is mainly imported and very expensive. Thereby, I adopted parameter design to realize homebred dry screw vacuum pump, the purpose of this paper is to simplify the design and machining of dry screw vacuum pump, to realize the industrialization of dry screw vacuum pump in our country and to offer clean vacuum environment for manufacture process.In this paper, firstly, several types of rotors were discussed, the equation of these rotors were listed, and the conditions of every type were analysed. And then the configuration of pump body and parts on the shafts were discussed, several configuration of dry screw vacuum pump and parts on the shafts were listed for choice.In this paper, several popular tools for development and computer language were discussed, the merits and faults of these softwares were compared. In the end, I decided to design the program with Visual Basic based on Solidworks.For the augmentation of the programme, the data base of rotors, pump body and parts on the shafts were built up. It made more easier for calling program, at the same time, it made potentially for increase of rotor types and improvement of pump body.It includes two aspects in this programme, calculation and ploting. Firstly, the parameter of rotors, pump body and parts on the shafts were calculated, and then, a general plot programme used in dry screw vacuum pump was developed based on these parameters.According to the programme, a 701/s dry screw vacuum pump was designed. Its end face profile is double sides and symmetrical circles. And then these parts of the pump were...