Structural Analysis And Optimum Design Of Poly-SiC Electrostatic Comb-Drive Actuator

Micro-electro-mechanical system (MEMS) is developed based on the micromation and intelligentization tide of science technology. It is composed of several parts such as micro actuator, micro sensor, signal processing and control circuit. As MEMS of integral components, actuator not only needed superiority material, but also rationalization design. However, silicon, the most commonly used material for MEMS today, cannot be used as the structural material in harsh environments due to its well-know susceptibility to high temperature, radiation and corrosive chemicals. Compared with Si, due to its outstanding electrical, mechanical and chemical properties, silicon carbide (SiC) has gained great attention by researcher as both coating and structural materials for MEMS. According to the development of requirement and trend of the MEMS, Ploy-SiC electrostatic comb-drive actuator has been structural analyzed and optimized. The main research works as follows:Firstly, the paper discusses the necessity of designing and analyzing of Poly-SiC electrostatic comb-drive actuator by analyzing actual development of MEMS and SiC material Properties and application in MEMS. The electrostatic comb-drive actuator principle is analyzed deeply. Acquired some parameters of that be used in the design. At one time, finite element analysis methods and software have been summed up.Secondly, finite element analysis techniques for build model of Poly-SiC comb-driver with ten fingers actuator have been developed in this paper. The intrinsic frequencies and the first six vibration models of Poly-SiC electrostatic comb-drive actuator has been gained by model analysis. Know about the dynamic behavior of Poly-SiC electrostatic comb-drive actuators in different parameters. Compare with Poly-Si electrostatic comb-driver actuator, Poly-SiC one always has a higher intrinsic frequency. According to model analysis of different Poly-SiC electrostatic comb-drive actuator to provides evidence for optimum design.Finally, with combination of FEA and optimum design, we research a practical optimum design in accordance with capability index of Poly-SiC electrostatic comb-drive actuator. In order to get good performance, especially aim at sensitivity of Poly-SiC electrostatic comb-drive actuator, the paper has been developed optimum design. At the same time, based on the model analysis, Poly-SiC electrostatic comb-drive structures adopted reduced order model (ROM) in the paper. Harmonic response analysis of Poly-SiC comb-driver has been developed. The resonant frequency 113 KHz and maximum deflection 0.11um have been gained, which validates design correctness.