The Mechanics Analysis Of MEMS Pendulous Oscillating Gyroscopic Accelerometer With Electrostatic Comb-driver And Capacitance Read-out

Micro-machined accelerometer has been widely used in both military and civilian applications due to their simple structure,high sensitivity,long life and relatively inexpensive price.In this thesis a pendulous oscillating gyroscopic accelerometer(POGA) with electrostatic comb-driver and capacitance read-out is has been carefully analyzed.Firstly,the working principal of three-dimensional macro PIGA has been introduced, and then the three-dimensional PIGA be transferred into a two-dimensional devices POGA to meet the needs of MEMS fabrication technology.During the transformation,the two-dimensional POGA keeps all physical feature of the three-dimensional PIGA,which is vital for the successful of POGA.Then we discussed every single element of the POGA with lots drawings.Then,integrating all necessary knowledge of electronics,mechanics,we derived all equations for each element,finally we obtained a POGA sensor equation.Finally,A reprehensive design of the POGA has been implemented numerically by using ANSYS.The free vibration modes and corresponding natural frequencies have been obtained.