Analysis And Improvement Of Comb MEMS Optical Switch

This thesis summarizes the technical properties, researching applications anddevelopments in the world on MEMS optical switches. Aim a double layer electrostaticcombstructureopticalswitch,usingLagrange-Maxwellequation,analyzeandcalculatethe dynamic response process of the system of the double layer electrostatic combstructure under the step voltage on the energy condition, the Lagrange function isconstructed, the mathematical model of the system is established. Make the simulationby Matlab, obtaining dynamic response process of the system and searching after themethodtoenhancethecapabilityofMEMSopticalswitches.On this condition, introduce the conception of air-film damp combs, the responsetime of the system is amended. A program of a feeds back electric capacitance isproposed, make an improvement to the structure of MEMS optical switch, add a feedsback electric capacitance to the optical switch system, the engagement of the comb isincreased, the stabilityof MEMS optical switch is enhanced. The structure optimizationmodel is established, the objective function and constraints is determined, Optimize theresponsetimeofthedoublelayerelectrostaticcombsystem.