The Production Process Monitoring System Research And Implementation Based On MES Platform

Nowadays more and more manufacturing companies according to their business processes manage the production and improve equipment productivity through the deployment and implementation of manufacturing execution systems (MES). As a link between process control system(PCS) and enterprise resource planning(ERP),MES can communicate with them and transmit information in production process.The production process monitoring system is an important subsystem of MES,which can check matching between production processes and equipment parameters.The system can highly increase the equipment productivity.Semiconductor industry is characterized by intensive capital and complex processes. Only relying on manual monitoring of production,there are many problems,such as less information,high error rate and so on. It is necessary for semiconductor companies to implement the production process monitoring system based on MES.This paper analyzes the status of semiconductor companies and business processes of semiconductor industry. In order to solve problems of semiconductor companies that only rely on manual monitoring of production, this paper studies the solution of implementing the production process monitoring system based on MES platform. MES is the industry specific solution for the specific company, this paper analyzes the equipment communication information formats based on semiconductor equipment communication standard(SECS), proposes a method of extending formats by increasing the information items.In that way,I optimize data acquisition module of the production process monitoring system so that it can be compatible with different kinds of formats. I design the system structure, function modules and system database on the basis of researching MES and process management function model theory.Finally,I implement the production process monitoring system and verify the function of the system through some tests.The application of this system significantly improves the efficiency of production process monitoring in semiconductor companies and achives good economic and social benefits.