Primitive-generating Algorithm For Novel Pattern Generator With DSP Chip As Key Component

In this thesis, we introduce the primitive-generating algorithm and software development of a novel pattern generator in which DSP chip is considered as its key component. Especially the generation algorithm of conic primitives such as circle and ellipse is given.This paper introduces the development of electron beam lithography around the world and basic fundamentals of pattern generator. Further analysis and research to both TI's TMS320VC33 DSP chip and development of software and hardware is given according to the existing problem of pattern generator, as to propose a novel type of pattern generator.In this paper, a primitive-generating algorithm and filling strategy, which are applied to Pattern Generator of Electron Beam Lithography System, are proposed on the basis of Bresenham Algorithm. The algorithm can estimate the pixels that are closest to the curve of function by setting determination function and increment. The Pattern Generator can elicit all the relevant pixels of the circle primitive with fast rate. The key component of the Pattern Generator is DSP that generates signals to DACs and controls the deflector to generate the pattern primitives required to complete the fabrication. This algorithm not only fits the performance of hardware such as DSP chips and simplifies the data processing but improves the generation speed and precision of primitives as well.This thesis focuses on the software part of pattern generator and analyses its structures and fundamentals. And the research and realization of primitive-generating algorithm and filling strategy is the core part of this thesis.