Research On The High Accuracy Linear Diameter Measurement System Based On CCD

This paper introduces the application of linear CCD in non-contact measurement, clarifies the structure of non-contact measuring system and problem needed to resolve.In the experiment of this thesis, a high accurate measurement system based on linear array CCD is made up; the illumination system is improved, and curve fit is adored to obtain the margin value. Finally, the size of the obtained object is less than the pixel dimension according to lens magnification p.In the thesis, the error analysis of the instruments and error correction curve is presented, so the measurement accuracy is relatively high. In addition the same parameter is measured by using diffraction theory. At last, the two measurement means are compared with each other and the evaluation for both means is given.Experimental results show that total uncertainty is about ±7.04um within 0.5~9.5mm.