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Investigation On FED Sealing And Gas Exhausting Technique

Posted on:2004-08-04Degree:MasterType:Thesis
Country:ChinaCandidate:J L ChenFull Text:PDF
GTID:2168360092475087Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
In this paper, the structure of FED , operation principle of FED and the manufacturing process were presented at first. Emphasis of this paper was put on the investigation in low melting-point glass sealing technique and gas exhausting technique. As the sealing technique and gas exhausting technique were carried out in the later manufacture stage, the technique result would relate to good finished ratio of FED ,which is very important for the whole FED manufacture . The whole process of sealing technique was introduced in this paper and the optimal temperature program of sealing was gotten. The result of the sealing ,such as sealing stress, leak proofness and the oxidation of electrode and cathode were discussed in this paper . Some feasible measures of these problem were put forward. At the same time, the method of getter placing, reconstructing of HF-inducting heating loop and getter high temperature firing technique were mainly described in this paper. In lack of necessary experience and some instrument ,the designs of some simple instrument and some testing and analysis system were introduced in this paper.
Keywords/Search Tags:Field Emission Display, Low melting-point glass, Sealing, gas exhausted, Getters
PDF Full Text Request
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