The Key Technology Of Preparing Carbon Nanotube Field Emission Display

Aiming at the practical and industrial application of carbon nanotube field emisson display (CNT-FED), the key technology of preparing CNT-FED was studied under the support of the High-Tech Program Committee of China and the Nano-tech Foundation of Shanghai. A whole set of CNT-FED preparing technology was developed base on screen-printing technique, including cathode preparation , field emission properties enhancement, triode structure preparation and device packing. The CNT-FED prototype devices with good performance were obtained. This thesis included following contents:一, The equipment establishedA multifunctional ultrahigh vacuum system was built for PECVD, plasma surface treatment, field emission characterization, vacuum sealing and vacuum annealing. At present, it can be used in CNTs growth on different substrate, cathode plasma surface treatment and field emission characterization etc.二, The improvement of field emission propertiesBy modifying the emitting surface of the CNT cathode and improving theconductivity of the CNT film as well as the contact performance of the CNT film with thesubstrate, the field emission properties of the screen-printed CNT cathode were improved.(1) After plasma surface treatment, the emission site density (ESD) of thescreen-printed CNT cathode has the magnitude enhancement and achieves a level forpractical use. FESEM shows that the CNTs on the film surface were completelycovered by nano-particles, and HRTEM shows those nano-particles are multilayeredfullerenes, which is similar to the CNT tip. It is suggested the combination offullerenes and CNT wall cause the CNT emission mechanism form "single-tip" to...