| Field emission display (FED) colligates the advantages of Cathode Ray Tube(CRT) and the other Flat Panel Display(FPD), which show high brightness and distinguishability, quick response, wide visual angle and operating temperature range, low power consumption and work voltage, excellent color saturation, etc. FED has become a prominent device in FPD. Now the key to fabricate FED device is to find a economical and credible cathode, which has excellent field emission capability and simple manufacture technology.In the thesis , amorphous nano-carbon films and carbon nano-tubes films(CNTs) are synthesized by microwave plasma enhance chemical vapor deposition (MPECVD). The relationship of experiment parameter and field emission character are explored. The surface topography and structure of the films are studied. The triode field emission fluorescence tube, in which CNTs films was use to be cold cathode, is developed. The main points of the thesis are as follows:Exploring the experiment condition and technology parameter to synthesize amorphous nano-carbon films on crystal silicon substrate by MPECVD. Optimizing the technology parameter by studying the influencing factors, which include gas specific flux, temperature, pressure time and catalyst. Analysing the films' surface topography and structure by scanning electronic microscope(SEM), X ray diffraction(XRD), Raman spectrum. Studying field emission characters of the film by using field emission equipment, and good experiment results have been obtained, with low turn-on field(only 0.39 V/μm), high current density(3.06 mA/cm~2 at 1.85 V//μm ), high spots density(10~4/cm~2).We have investigated the experiment condition and technology parameter to synthesize CNTs films on steel substrate by MPECVD. Finding a way to synthesize CNTs at lower temperature, its excellent field emission character has testified. Its turn-on field is 2.16 V/μm, Its current density is 1.35 mA/cm~2 at 4.07 V/μm. |
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