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Physics, technology and electrical aspects of scaled MONOS/SONOS devices for low voltage nonvolatile semiconductor memories (NVSMs)
Posted on:
1990-12-12
Degree:
Ph.D
Type:
Dissertation
University:
Lehigh University
Candidate:
Libsch, Frank Robert
Full Text:
PDF
GTID:
1478390017954660
Subject:
Electrical engineering
Abstract/Summary:
Scaled SONOS/MONOS (polysilicon-oxide-nitride-semiconductor)/ (metal-oxide-nitride-oxide-semiconductor) nonvolatile memory devices for low voltage (5-10 V) E...
Keywords/Search Tags:
Devices for low voltage
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