Research On Module Design And Fabrication Method Of Binary Optical Element

On the basis of analysis of the application, design and fabrication status of binary optical elements (BOEs), the conclusion is obtained that the application of BOEs is developing towards the integration with micro-electro-mechanical systems (MEMS), while the design theory and technology still stay on the status of single element's design and machining. In order to meet the need of the integrated development, this thesis focus on system design method of BOEs, design algorithm of module level, making technologies, and fabrication equipment. The research results will be laid a foundation for the design and realization of binary-optical components and also provides a new research direction for the integration of BOEs with MEMS. The main contents and contributions of this dissertation are as follows:In order to adapt the demand of integrated application, learning from the design idea of microelectronic technology, this thesis put forward the design scheme of layered system based on BOEs for the first time, including system-level design, module -level design, design-level design and model establishment of element fabrication.The conception and method of transverse design technique of binary-optical components is presented for the first time, which is a design method of component integration. This technique is based on the state and position of elements in real application and takes multiple BOEs as design object, which can avoid the alignment error caused by assembly on the basis of single element design in integrated application.Based on the scalar diffraction theory and the constraints of Fraunhofer approximation, a design algorithm of binary-optical module has been deduced. Combining the algorithm with the transverse design technique, the subtractor module has been successfully designed. The validity of transverse design technique and algorithm of binary-optical module have been verified.Using the stereolithography process for reference, this paper presents a new binary-optical fabrication technology, namely the transverse additive stereolithography. Technical errors have been analyzed and simulated. The results show that the new technology is insensitive to the alignment error. This new technology not only supports the component machining designed by transverse design technique, but also belongs to additive technology with microelectronic and micro machine technology. Hence the technology has good compatibility.Combined with virtual digital-mask technique, the BOEs-fabrication equipment has been developed. Compared with the traditional stereolithography equipment, our equipment has better controllability and costs less. In order to promote the machining precision of element, system error is analyzed to easily carry out modification during design. Comparing the grating fabricated with this equipment to that on resist with traditional technology, we conclude that the new technology is feasible and the novel equipment is satisfied with experiment.During the system design, the idea of model establishment of element technology has been definitely presented. By taking the element model establishment of Fresnel lenses for example, the method to establish the model of element technology is described. The conception of technology model provides the basis of inter-industry interface for the industry division of binary-optical design and fabrication. And it will benefit the development of binary-optical field.