Architecture Design And Analysis Of Binary Optics Elements Laser Direct Writing Equipment's Drive System

Laser Direct Writing (LDW) is an advanced fabrication technique for diffractive optical elements (DOEs). LDW equipment adopting laser direct writing technique is substance foundation for researching and manufacturing DOEs. Basing on the Four-axis LDW equipment manufactured by Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Science, the paper analyses Y-axis transmission system of this equipment systematically, it can provide some consult for designing and detecting high-precision transmission system.Basing on Y-axis' function request and design indexes of binary optical element's laser direct writing equipment, and simply contrasting with other projects of high-precision transmission system design, the paper puts forward the project of total structure design of the transmission system. This project meets the transmission index of long stroke and high positioning accuracy, the positioning accuracy is sub-micron degree. At the same time, the paper puts forward the design projects of each part of the transmission system, explains design thoughts of several parts, such as the ballscrew, aerostatic guide, connection of ballscrew and aerostatic guide. So the paper will be a good reference for developing similar task.For the transmission system structure, the paper analyzes structure performance figure simply. For the transmission system's the least displacement sensitivity, affection factors of positioning accuracy, system toughness and natural frequency, the paper calculates them carefully. Through a great deal of work as above, we affirm that the project of total structure design is feasible.Because precision detecting is very important, it can judge whether the design is good or not, the paper describes the detecting process detailedly. Several main detecting instruments which are used in the detecting work are introduced, such as HP5528A dynamic calibration, high-precision inductance scale micrometer and the cubical glass which has been demarcated. For the displacement sensitivity and positioning accuracy of transmission system, guide linearity, the detecting process and detecting result are expatiated. The detecting results are evaluated simply.