Research On Fabrication Model Of Binary Optical Components Based On Addition Technology

Binary optics is an important branch of micro-optics and a frontier subject permeatethe electric technology and optics. With the development of Micro Optic andElectronic Mechanical Systems, making the binary optical elements meet therequirements of design and produce which is micromation，array and integration. Thecommon production and fabrication of binary optics is just for single element or array.To meet the demand of integrated application, we need to explore a manufacturingprocess which is suitable for making more than one binary optical elements at thesame time,taking into account the compatibility of micromechanics andmicroelectronics. In order to achieve the production of binary optical components,in this paper, we study a establishment method of binary optical elements which isbased on transverse addition technology and DMD virtual mask. Take the elements’fabrication model of one-dimensional subtractor components as an example, finishbuilding the fabrication model of elements and check its correctness according todigital simulation.The main contents and contributions of this dissertation are as follows:Put forward the requirements of fabrication model which is based on transverseaddition technology and DMD virtual mask, according to analyse the research valueof binary optical components and transverse addition technology.Take one-dimensional subtractor components as an example, we build thefabrication model and analyse quantization error. Meanwhile, test the function ofsubtractor components by digital simulation and get the expected effect. So, it provesthe correctness of fabrication model.Set up the experiment system of Stereo lithgrapy Appratus (SLA)which is based onthe technology of DMD virtual mask. Research main technical parameters by onespecific photosensitive resin.Do the experiment of one-dimensional subtractor components with fabricationmodel and technological parameters, obtained a degree of success.The studies of this paper explain the effectiveness of the elements’ fabricationmodel, the feasibility of the process of micro-SLA.