| In integrated electronic chips,silicon can perform different functions simultaneously.However,silicon or silicon nitride alone in integrated optoelectronic devices cannot achieve multiple functions simultaneously,such as generation,detection and modulation of light.Due to the central symmetry property of silicon and silicon nitride materials,they do not possess second-order nonlinear effects.Through the integration of two-dimensional materials with micro-structures on the chip,new nonlinear properties can be given to such centrosymmetric materials by virtue of the nonlinearity of two-dimensional materials.When performing nonlinear experiments of on-chip integrated devices,since on-chip integration of light source cannot be realized yet,it is still necessary to solve how to efficiently couple the light transmitted in the fiber into the nano-photonic chips.Based on the above ideas,this paper mainly carried out the following two aspects of research:1.Mode field size of different waveguides and the mechanism to achieve highly efficient coupling are analyzed.From the aspect of simulation and experiment two efficient coupling models are explored.Finally,a stable combination scheme of taper fiber and cantilever waveguide is proposed,and the coupling efficiency in theory exceeds 97% in the wavelength ranging from 1400 nm to 1850 nm.And the performance of the structure is verified experimentally.2.The direct growth of single-crystal tungsten sulfide of tens of microns in integrated silicon nitride waveguide is realized by physical vapor deposition,and the continuous growth of single-crystal monolayer tungsten sulfide onto sub-millimeter waveguide is realized by controlling the growth process.Experimental results show that significant second harmonic signals are generated in the tungsten sulfide / silicon nitride hybrid waveguide,breaking the bottleneck that second harmonic signals cannot be generated in silicon nitride. |
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