| High speed precision positioning worktable is a core component used in key processes such as wafer manufacturing,chip processing,and chip packaging in the microelectronic manufacturing industry.Developing precision positioning worktables with high speed,large stroke,and high accuracy characteristics has become an important demand in the current semiconductor industry in China.However,there is a contradiction between high speed,large stroke,and high accuracy characteristics.To solve this problem,a voice coil motor is combined with a giant magnetostrictive actuator,and a structure scheme of a coaxial integrated macro micro composite actuator with large stroke and high accuracy characteristics is proposed.In order to achieve high-precision positioning control of the macro micro composite actuator,this paper conducts research from three aspects:optimization of its magnetic circuit structure,kinematics model,and experimental verification.The main research contents and conclusions are as follows:In order to optimize the magnetic circuit structure of the macro micro composite actuator,the macro motion,micro motion,and overall magnetic circuit models of the macro micro composite actuator were established based on the magnetic circuit method.Through numerical simulation and analysis of the magnetic field,the influence of the structure of the macro moving permanent magnet,the relative permeability of the yoke,the coil current on the magnetic circuit,and the interaction between the macro and micro magnetic fields with different parameters were obtained.In order to improve the modeling accuracy of the macro micro composite driver driving model,a nonlinear driving model of the macro-micro composite driver was established considering the nonlinear characteristics of the voice coil motor.The finite element method is used to analyze the magnetic field distribution in the macro moving part,and the driving force model,static friction model,electromechanical time constant variation model and kinematics model are established.The least square method is used to identify the model parameters.In order to verify the feasibility of the macro micro composite driver scheme,an experimental platform was built on the basis of a machining prototype,and the output performance of the macro micro composite driver was tested.The dynamic characteristics of the macro micro composite driver were also analyzed.The structure of the macro micro composite driver was improved to improve the dynamic performance of the actuator.The research results show that when the macro permanent magnet adopts a six piece tile structure and the relative permeability of the macro yoke is above 400,the relationship between the macro force and the macro coil current is approximately linear,and the interaction between the macro magnetic field and the micro magnetic field is less than 0.001 wb/m~2 under different parameters;The magnetic field at the working air gap of the macro part of the macro micro composite driver is related to the macro displacement and macro coil current;During startup,the friction force of the actuator changes complex,and the classical friction model can only approximately reflect the change in friction force;The established kinematic model of the macro moving part can reflect the dynamic characteristics of the macro moving part,with a matching degree of 92.97%;The macro power of the prototype can reach 53N,the maximum acceleration can reach 6.7g,the maximum driving stroke can reach 47mm,and the maximum positioning error of macro moving part is 5μm.The improved macro micro composite actuator has an output force of 70.23N when the macro coil current is 4A.The research results show that the design scheme of the coaxial integrated macro micro composite actuator proposed in this paper is reasonable and feasible,laying a theoretical and technical foundation for the subsequent development of a high speed,large stroke positioning controller for the macro micro composite actuator.Figure[71]Table[4]Reference[71]... |
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