Vertical Structure Photodetector Array Based On Semi-insulating SiC Substrate And Its Readout Circuit

Photoelectric detector is the core of photoelectric detection system.The third generation semiconductor SiC has the characteristics of wide band gap,high breakdown electric field,high thermal conductivity,low coefficient of thermal expansion,high saturated electron drift velocity,strong radiation resistance,and stable chemical properties.Therefore,many researchers are committed to the study of SiC Based photodetectors.Among SiC photodetectors,there are SiC photodetectors with planar structure and SiC photodetectors with vertical structure.The photodetector array is composed of many SiC photodetector detection units with vertical structure,and each detection unit can output current respectively.The signal acquisition and processing circuit is an important part of the photoelectric detection system.It collects,processes and displays the current signal generated by the photoelectric detector.When the signal acquisition and processing circuit is used together with SiC photodetector array,the signal acquisition and processing circuit(readout circuit)collects the current of each detection unit of SiC photodetector and displays it.The main research contents of this paper are as follows:(1)The Al/Al electrode photodetector array was prepared,and the performance of the Al/Al electrode photodetector array in room temperature and high temperature environment was characterized.The obtained data and experimental phenomena were compared and analyzed.The Ti N/Ti N electrode photodetector array was prepared.The performance of the Ti N/Ti N electrode photodetector array in room temperature and high temperature environment was characterized.The obtained data and experimental phenomena were compared and analyzed.Finally,the performances of the two photodetector arrays are compared and summarized.(2)The hardware circuit of the display circuit is prepared and tested,and the labview software program of the display circuit is written.The SiC electrode photodetector array,hardware circuit and labview software program are tested.