Static And Dynamic Analysis And Error Compensation Of Dicing Machine

As an indispensable automation equipment in the production process of semiconductor chips,the dicing machine has a very large market value.This topic selects the main components of the dicing machine that require high accuracy and stability to analyze,and conducts dynamic and static analysis of the selected structure based on the finite element analysis software to verify the reliability of the strength and stiffness of the dicing machine structure.The error model is constructed and the error compensation results are compared to verify the effectiveness of the compensation on its accuracy.The main research contents of this topic include the following points:(1)Static characteristic analysis.According to the characteristics and requirements of the dicing machine,the existing three-dimensional model is simplified and the static structure analysis is carried out,and the analysis results of the strength and stiffness of the ball screw Y-axis are obtained.(2)Finite element modeling and dynamic analysi s.X,Z,Y axis transient dynamic analysis is carried out by ANSYS Workbench finite element analysis software.The influence of the time-varying load on the fuselage structure of the dicing machine is determined,and the variation of the fuselage stiffness and strength is obtained.(3)Analysis of dynamic characteristics.The modal analysis of the Y-axis screw and the dicing machine body was carried out to obtain the natural frequency and corresponding mode shape of the structure,and the weak points of the structure were analyzed to determine whether each component would resonate.(4)Analysis of ambient temperature fluctuations.Using ANSYS finite element simulation software,the temperature field and thermal deformation of X,Y-axis base and marble fuselage under different ambient temperatures are simulated,the geometric accuracy of the structure under different ambient temperature fluctuations is analyzed,and the amount of structural deformation caused by ambient temperature fluctuations is obtained.The impact of the dicing machine provides a basis for the improvement suggestions for high-precision cutting of the dicing machine.(5)Error compensation and analysis.Build an overall error model,perform error detection,and error compensation for errors in the movement process,compare the data results before and after error compensation,analyze the structure and accuracy of the dicing machine,and verify the effectiveness of the error compensation scheme.